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Optimization and Simulation of a Multi-finger Micro-accelerometer;

梳齿式微加速度计优化设计与仿真分析

Due to the negative rigidity and other special problems,the closed loop control system for multi finger micromechanical silicon accelerometer is differ from the conventional closed loop control system.

由于负刚度等特殊问题 ,使叉齿式微硅机械加速度计的闭环控制区别于常规闭环系统 ,并且负刚度较大地影响微加速度计工作稳定性。